Piezoelectric/electrostrictive actuator having ceramic substrate with auxiliary windows in addition to pressure chamber windows
US5376856A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Feb 22, 1994 |
| Grant date | Dec 27, 1994 |
| Priority date | — |
| Expiry date | Feb 22, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
Abstract
A piezoelectric/electrostrictive actuator including a ceramic substrate and piezoelectric/electrostrictive elements is disclosed. The ceramic substrate includes: a spacer plate having a plurality of windows formed in a row in the longitudinal direction of the spacer plate, and auxiliary windows formed adjacent to respective two outermost windows which are located at the opposite ends of the row of the plurality of windows, such that the auxiliary windows sandwich the row of the plurality of windows; and a closure plate superposed on one of opposite major surfaces of the spacer plate, so that the plurality of windows and the auxiliary windows of the spacer plate are closed by the closure plate to provide pressure chambers and enclosed spaces, respectively, within the substrate. The spacer plate and the closure plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral structure as the ceramic substrate. The piezoelectric/electrostrictive elements are disposed on respective portions of the closure plate which partially define the pressure chambers, respectively, but are not disposed on respective portions of the closure plate wh…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.