Arrangement for storing, transporting and loading substrates

US5377476A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Gudrun Bohmer · Stuttgart, DE
• Josef Gentischer · Winnenden, DE
• Rolf Lehner · Eßlingen, DE
• Dieter Modjesch · Nufringen, DE
• Wolfgang Schmutz · Rottweil, DE

Key dates

• Filing date: Mar 19, 1993
• Grant date: Jan 3, 1995
• Expiry date: Mar 19, 2013

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which are positively stackable. By means of a lifting means, the cassettes are positioned external to a loading slot of the clean room. A lateral sealing flap in the cassette is opened and the substrate is moved into the loading slot in a substrate drawer.