Stocker
US5380503A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 1993 |
| Grant date | Jan 10, 1995 |
| Priority date | — |
| Expiry date | Mar 11, 2013 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB03C3/47
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A stocker for accommodating, storing or transporting articles in clean, contamination-free conditions for either a long time or temporarily. The stocker has a particle collector provided in a part thereof. The particle collector includes an irradiation source such as ultraviolet light source, and a photoelectron emitting material that emits photoelectrons on irradiation with irradiation energy from the irradiation source. The particle collector further includes an electric field forming electrode, and a charged particle collecting material. The space where the particle collector is provided is preferably partitioned from the other space of the stocker by an irradiation energy screening material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.