Method and apparatus for delivering gas
US5381605A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 8, 1993 |
| Grant date | Jan 17, 1995 |
| Priority date | — |
| Expiry date | Jan 8, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Method and apparatus for generating and delivering a gas that contains vapor produced by subliming a solid for use in chemical vapor deposition processes such as Metal Organic Molecular Beam Epitaxy (MOMBE) and Organometallic Vapor Phase Epitaxy (OMVPE). The method includes generating a gas saturated with the vapor and subsequently diluting the gas with an inert gas to obtain an uniform non-saturated gas. The apparatus includes a vessel for containing a sublimable solid, a heater for maintaining the vessel at a desired temperature, tubes and valves for introducing a gas into the vessel and for discharging a gas that is saturated with the vapor of the solid from the vessel, and a tube and a valve for diluting a gas discharged from the vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.