Adherent metal coating for aluminum nitride surfaces
US5382471A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 1993 |
| Grant date | Jan 17, 1995 |
| Priority date | — |
| Expiry date | Feb 3, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A metallized aluminum nitride substrate (40) has a first layer (42) of deposited metal, comprising chromium, chromium oxide, and an aluminum nitride/chromium oxide complex represented by the formula EQU Al.sub.a N.sub.b O.sub.c Cr.sub.d where a, b, c and d are numbers representing relative combining ratios. The first layer is formed by sputtering about 10-500 .ANG.ngstroms of chromium onto the substrate under vacuum, and then heating the substrate in an oxygen-containing atmosphere at conditions of time and temperature sufficient to convert at least portions of the deposited chromium to chromium oxide, in order to form an adherent metal system. A second layer (44) of metal such as chromium covers the first layer. A third layer (46) of metal is deposited on the second layer in a manner sufficient to prevent oxidation of the second layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.