Method and apparatus for measuring the dimensions of an object
US5383022A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 6, 1993 |
| Grant date | Jan 17, 1995 |
| Priority date | — |
| Expiry date | Apr 6, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/245
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Laser beams from separate sources are deflected by a rotating mirror and travel over further mirrors and objective lenses into a measuring field for measuring the dimensions of an object 3 in the x and y directions. The result is a simple, compact configuration. The separate optical systems for both measuring directions can be set in an optimum manner independently of one another, permitting great precision. Thanks to an offset of the optical axis of the incident laser beams relative to the rotation axis of the mirror the measurements in the two directions are made staggered in time so that the measurement signals can be processed in a common measuring channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.