Optical surface flatness measurement apparatus
US5383025A · kind A · utility
6Cited by
2References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 23, 1992 |
| Grant date | Jan 17, 1995 |
| Priority date | — |
| Expiry date | Dec 23, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The flatness of at least a portion of a substantially planar surface (16) is measured by illuminating the surface through a beam splitter (12) incorporating a grid (13) or other patterned shield. The light pattern reflected from the surface (16) is directed by way of a reflector (14) back through the beam splitter (12) and thus through the grid (13). The image exiting the beam splitter (12) has characteristics representative of the flatness of the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.