Optical device and a method of manufacture thereof
US5384872A · kind A · utility
25Cited by
11References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1993 |
| Grant date | Jan 24, 1995 |
| Priority date | — |
| Expiry date | Jan 27, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3692
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A block of monocrystalline silicon oriented so as to have a body surface aligned in a {110} crystallographic plane is selectively etched so as to define a groove for receiving an optical waveguide and a reflecting surface facing the groove. The groove is aligned with a <110> crystallographic axis. The reflecting surface is in a {100} crystallographic plane. Thus, the groove is parallel to the body surface and the reflecting surface is at 45.degree. to the body surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.