Patent · US Expired

Exposure unit and method for exposing photosensitive materials

US5386268A · kind A · utility

20Cited by
7References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 26, 1993
Grant dateJan 31, 1995
Priority date
Expiry dateJul 26, 2013

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/201
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An exposure unit and method for imaging a photosensitive material includes a source of radiation for exposing the photosensitive material to actinic radiation such that the radiation strikes the photosensitive material at a plurality of angles of incidence, and apparatus for moving the radiation source relative to and in a plane parallel to the photosensitive material. The exposure unit also has a reflector for controlling (1) the proportion of (a) radiation having perpendicular angles of incidence to (b) radiation having non-perpendicular angles of incidence, such that the radiation having non-perpendicular angles is increased, and (2) the distribution of non-perpendicular angles of incidence.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.