Waterborne photoresists having polysiloxanes
US5387494A · kind A · utility
8Cited by
2References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 1994 |
| Grant date | Feb 7, 1995 |
| Priority date | — |
| Expiry date | Mar 30, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/111
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A waterborne photoimageable composition or photoresist comprises a latex binder polymer having sufficient carboxylic acid functionality to render it developable in alkaline aqueous solution, a photopolymerizeable monomer fraction, a photoinitiator chemical system and a poly(siloxane(s)).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.