X-ray inspection apparatus for electronic circuits
US5388136A · kind A · utility
12Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 1993 |
| Grant date | Feb 7, 1995 |
| Priority date | — |
| Expiry date | May 24, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An X-ray computerized system for programmable, high-resolution X-ray inspection of manufactured electronic circuits. Such a system comprises: means for directing X-rays to produce X-ray images representing illuminations of circuit elements from different angles; and detecting means for detecting said images, said detecting means comprising a plurality of detectors, each of said detectors positioned to intercept X-rays after passing through a circuit element from a particular associated angle of illumination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.