Atmosphere sensor and method for manufacturing the sensor
US5388443A · kind A · utility
Inventor
Key dates
| Filing date | Jun 24, 1993 |
| Grant date | Feb 14, 1995 |
| Priority date | — |
| Expiry date | Jun 24, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor or detector for fluid parameters is in the form of a substrate having at least two cavities and at least two sensing or detecting portions bridging respective cavities. The sensing portions include a first sensing unit which is exposed to the ambient and a second sensing unit which serves a compensating function and is in an air-tight enclosure formed by joining a cover plate with the substrate by a solid adhesive layer formed around the boundary of the second sensing unit. An adhesive tape can be attached to the cover plate to facilitate dicing and separating sensors or detectors that are initially formed on the same substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.