Electrode array microchip
US5388577A · kind A · utility
27Cited by
10References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 4, 1993 |
| Grant date | Feb 14, 1995 |
| Priority date | — |
| Expiry date | May 4, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrode array microchip, fabricated preferrably using CMOS technology, comprising electrodes made with overglass cuts over metal2 regions is disclosed. Overglass cuts of dimensions approximately an order of magnitude smaller than dimensions quoted in current design rules for CMOS technology are successfully employed to make exposed electrodes of dimensions on the order of microns. Thus, the electrode array chip can be produced cheaply on commercial fabrication lines. The invention finds many uses in biology and medicine, particularly when applied to the measurement of neural electrical activity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.