Methods for fabricating three-dimensional micro structures
US5389196A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 1992 |
| Grant date | Feb 14, 1995 |
| Priority date | — |
| Expiry date | Jan 30, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for producing a three-dimensional object includes the steps of providing an interface plane within a chamber and generating a beam of radiant energy having varied levels of beam energy density. The beam is directed to selectively expose a pattern of address points on the interface plane to the beam of radiant energy for a limited duration. Conditions are established in the chamber to enable the beam to induce a micro-chemical reaction at the interface plane at a rate which serves to form a portion of the three-dimensional object. A significant feature of the invention is that the micro-chemical reaction is substantially binary with respect to the beam energy density. That is, the reaction is either substantially "on" or substantially "off."
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.