Waterborne photoresists having non-ionic fluorocarbon surfactants
US5389495A · kind A · utility
6Cited by
1References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 6, 1994 |
| Grant date | Feb 14, 1995 |
| Priority date | — |
| Expiry date | Apr 6, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/111
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A waterborne photoimageable composition or photoresist comprises a latex binder polymer having sufficient carboxylic acid functionality to render it developable in alkaline aqueous solution, a photopolymerizeable monomer fraction, a photoinitiator chemical system and surfactant which is a fluoroaliphatic oxyethylene adduct.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.