Apparatus and method for displaying wafer test results in real time
US5390131A · kind A · utility
29Cited by
16References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1992 |
| Grant date | Feb 14, 1995 |
| Priority date | — |
| Expiry date | Apr 6, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F11/321
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is a method for displaying wafer test results from an integrated circuit tester in real time. The method comprising the steps of: (a) receiving wafer dimensions and die dimensions from a wafer handler; (b) creating a template representative of a wafer having cells representative of a die from the wafer dimensions and the die dimensions; (c) displaying the template; (d) invoking a tester to test a selected die of a selected wafer; (e) receiving test results from the tester; (f) displaying the test results on a selected cell which corresponds to the selected die; and (g) repeating steps (d)-(f) as required.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.