Apparatus for chemical vapor deposition of diamond including graphite substrate holders
US5391229A · kind A · utility
8Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 1993 |
| Grant date | Feb 21, 1995 |
| Priority date | — |
| Expiry date | Jul 26, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Graphite substrate holders for employment in apparatus for chemical vapor deposition of diamond decrease the tendency of the formed diamond sheets to crack or shatter upon separation from the substrates. Said holders and the substrates therein preferably have rounded edges, to suppress crack formation at sharp corners. The holders are preferably coated, at least in part, with a tie-layer and a hydride-forming metal such as niobium. Also, certain maximum distances between the edges of the holder and substrates are preferably maintained in order to prevent contact of diamond with a heated filament employed for thermal activation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.