Scanning probe microscope
US5391871A · kind A · utility
17Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 1992 |
| Grant date | Feb 21, 1995 |
| Priority date | — |
| Expiry date | Jun 2, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/869
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning type probe microscope apparatus for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed. In the apparatus, the sample is inclined relative to a scan direction of the probe by a inclination mechanism. Of a signal component corresponding to the surface state of the sample, a signal component having an optional space frequency is selected to be detected by a detecting circuit. The inclination mechanism is controlled on the basis of a detection result of the detecting circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.