Capacitive position sensor including a scale with integral topographical features which effect the mutual capacitance between cursor electrodes
US5394096A · kind A · utility
Inventor
Key dates
| Filing date | Nov 16, 1993 |
| Grant date | Feb 28, 1995 |
| Priority date | — |
| Expiry date | Nov 16, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/2415
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive position sensor has a scale (10), having hollow or raised topographical features, and a cursor (20) having an electrode array comprising at least two transmitting electrodes (21a, 21b) and at least one receiving electrode (21c) separated by shielding electrodes (21g). The coupling capacitances (Cac, Cbc) between transmitting and receiving cursor (20) electrodes are modified as a function of the position (x) of the scale topographic feature (11) relative to the cursor, the evaluation of the variation of the signals picked up by the receiving electrode permitting a precise measurement of the relative displacement between scale and cursor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.