Displacement element, cantilever probe and information processing apparatus using cantilever probe
US5396066A · kind A · utility
30Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1994 |
| Grant date | Mar 7, 1995 |
| Priority date | — |
| Expiry date | Jun 3, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A displacement element including a substrate having electrodes and a cantilever provided on the substrate, wherein the cantilever is formed from a semiconductor material and has at least two electrostatic driving electrodes formed by diffusing an impurity into a semiconductor material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.