Patent · US Expired

Waveguide type displacement interferometer having two reference paths

US5396328A · kind A · utility

88Cited by

7References

7Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Dieter Jestel · Bad Oldesloe, DE
Andreas Franz · Ludwigsburg, DE
Dieter Michel · Traunstein, DE

Key dates

Filing date	Sep 21, 1992
Grant date	Mar 7, 1995
Priority date	—
Expiry date	Sep 21, 2012

Classification

Technology area (CPC G)Physics
CPC primaryG01B9/02081
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The interferometer comprises a light source, at least one beam splitting means, a beam combiner means, measuring and reference arms as well as wave guides for guiding the light to the beam splitting means and for guiding the light back to photodetectors. Beam splitting means and beam combiner means are formed by integrated optics elements on a substrate. The wave guides on the substrate form a measuring arm (7.sub.1) and two reference arms (6.sub.1, 8.sub.1) which have different optical path lengths for setting a phase difference. An evaluation electronics for determining correct as to signs, the change in optical path length in the measuring arm (7.sub.1) is connected to the photodetectors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.