Excimer laser comprising a gas reservoir and a collecting receptacle and a method of refilling the gas reservoir of the laser with halogen gas
US5396514A · kind A · utility
54Cited by
4References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 1, 1993 |
| Grant date | Mar 7, 1995 |
| Priority date | — |
| Expiry date | Mar 1, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An excimer laser including a gas reservoir in which gas discharge is effected with the participation of halogen gas, comprises a collecting receptacle which communicates both with the gas reservoir and a halogen gas supply through conduits provided with shutoff valves. This apparatus is suitable for carrying out a method of refilling the gas reservoir of the excimer laser with halogen gas even if the pressure of the halogen gas supply is low and its volume restricted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.