Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same
US5398229A · kind A · utility
17Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 1994 |
| Grant date | Mar 14, 1995 |
| Priority date | — |
| Expiry date | May 10, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/947
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.