Amorphous oxide film and article having such film thereon
US5399435A · kind A · utility
38Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 16, 1992 |
| Grant date | Mar 21, 1995 |
| Priority date | — |
| Expiry date | Jan 16, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.