Cryopump and process for regenerating said cryopump

US5400604A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Hans-Ulrich Hafner · Neunburg vorm Wald, DE
• Hans-Jurgen Mundinger · Export, US
• Gerd Flick · Münstermaifeld, DE
• Hans-Joachim Forth · Neunburg vorm Wald, DE
• Hans-Hermann Klein · Hürth, DE
• Uwe Timm · Birkenfeld, DE

Key dates

• Filing date: May 18, 1993
• Grant date: Mar 28, 1995
• Expiry date: May 18, 2013

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S417/901
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9).