Microvalve

US5400824A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Horst Gschwendtner · Eßlingen, DE
• Jiri Marek · Reutlingen, DE
• Michael Mettner · Ludwigsburg, DE
• Gerhard Stokmaier · Markgröningen, DE
• Thomas Grauer · Stuttgart, DE

Key dates

• Filing date: Dec 29, 1993
• Grant date: Mar 28, 1995
• Expiry date: Dec 29, 2013

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/86759
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A microminiature valve in multi-layered structure for switching or controlling fluid flows is proposed, having an inlet and a closing element. The inlet is embodied in a first layer in the form of at least one through-opening. The closing element is structured out of a second layer which is applied on the first layer. This second layer has at least one further through-opening in the area of the closing element. The closing element is displaceable by actuation means, in particular electrical ones, essentially parallel to the first layer and the second layer, so that in at least one first position of the closing element the at least one through-opening of the inlet, together with the at least one further through-opening in the second layer, forms at least one flow-through opening. The cross section of the at least one flow-through opening can be varied by actuating the closing element.