Environmental control system
US5401212A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1993 |
| Grant date | Mar 28, 1995 |
| Priority date | — |
| Expiry date | Mar 19, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.