Process for fabricating a Josephson device
US5401530A · kind A · utility
14Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 1994 |
| Grant date | Mar 28, 1995 |
| Priority date | — |
| Expiry date | Mar 3, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/874
Abstract
A process for producing a Josephson device is disclosed, wherein a Josephson junction is formed over a recess step by oblique deposition and a protective layer of conducting material or semiconducting material is formed on the Josephson junction. The actual thickness of the Josephson junction is controlled to be smaller due to the proximity effect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.