Mass flow sensor

US5404753A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hans Hecht · Stuttgart, DE
• Wolfgang Kienzle · Hemmingen, DE
• Rudolf Sauer · Memmingen, DE
• Eckart Reihlen · Reutlingen, DE
• Kurt Weiblen · Metzingen, DE

Key dates

• Filing date: Jun 1, 1993
• Grant date: Apr 11, 1995
• Expiry date: Jun 1, 2013

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2224/73265
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A mass flow sensor detects the intensity of a media flow. The mass flow sensor includes a measurement chip, with a dielectric membrane and a frame of monocrystalline silicon. At least one heater is arranged on the membrane. The measurement chip is installed in the in-flow channel of a housing. By means of the structure of the housing, contamination of the measurement chip is reduced, thermal equalization with the media flow is improved, the resistance of the sensor to sudden pressure variations is increased, and the dielectric contacts are improved.