Silicon coating process
US5405658A · kind A · utility
12Cited by
10References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1992 |
| Grant date | Apr 11, 1995 |
| Priority date | — |
| Expiry date | Oct 20, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0879
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
This invention relates to an improved process for the thermal dehydrogenation of polysilicon granules in a fluidized bed reactor, the improvement which comprises introducing a varying electromagnetic field into the reactor whereby reactor walls are coated with silicon during the dehydrogenation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.