Method for microbeam ion radiation testing of photonic devices
US5406072A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 7, 1994 |
| Grant date | Apr 11, 1995 |
| Priority date | — |
| Expiry date | Mar 7, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed method is for radiation testing of a nanostructure photonic device under test (DUT). The method comprises the application of a beam of optical energy to the DUT, and then establishing a computer data base for the performance of the device under test during the application of the beam. Thereafter, a tightly focused, steerable radiation beam is generated and focused on to a selected nano sized area of the DUT. A second data base is established for the performance of the DUT resulting from the application of the radiation beam, and the data of the first data base are compared with the data of said second data base to determine the affects of applying the radiation beam to the DUT, or to alter the device physical properties such as its refractive indicies, absorption, preferred polarization, and electrooptic characteristics, including electrooptic coefficients, photoelastic constants, operational (fundamental) wavelength and coupling coefficients.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.