Surface inspection and characterization system and process
US5406082A · kind A · utility
50Cited by
60References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 1992 |
| Grant date | Apr 11, 1995 |
| Priority date | — |
| Expiry date | Nov 27, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/945
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and process for obtaining near real time, non-destructive inspection and characterization of surfaces. The system includes an infrared light source which is directed on a surface to be inspected. A portion of the reflected light is gathered and directed through an optical filter arrangement which separates the light into a plurality of sets of wavelengths which correspond to particular physical properties of the thin film, such as absorbance. The intensity of each set of wavelengths is detected by optical detectors and the resulting signals analyzed to characterize the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.