Method of and apparatus for measuring energy gap of semiconductor
US5406505A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Dec 15, 1992 |
| Grant date | Apr 11, 1995 |
| Priority date | — |
| Expiry date | Dec 15, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/3563
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus is disclosed for measuring an energy gap of a semiconductor material. The method contains the steps of analyzing a character of a reference semiconductor sample and setting an energy gap pixel value, estimating a transfer function between the pixel value, positioning the sample properly and imaging the spectrum to obtain a live image, storing the live image and scanning the respective pixel values along an x-axis of the image, sequentially comparing the respective pixel value and the energy gap pixel value, reading an x-coordinate of the pixel and converting the wavelength of the pixel to estimate the energy gap. The apparatus optically measures the energy gap and comprises a light source irradiating a light beam, a lens for focusing the light beam, a polychromator for irradiating the spectrum of light of the light beam to the sample, optical filters for evaluating a spectrum band of the polychromator into wavelength values, an image acquisition apparatus, an image signal processor, an energy gap detecting and displaying apparatus, and a computer for executing operation and control functions necessary to measure the energy gap by use of the image signal proce…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.