Method of frequency tuning a piezoelectric device and apparatus for the implementation of the method
US5407525A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1993 |
| Grant date | Apr 18, 1995 |
| Priority date | — |
| Expiry date | Dec 21, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H3/04
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method of frequency tuning a piezoelectric device and apparatus for the implementation thereof. A piezoelectric device having at least one resonating function is formed by two metallized electrodes facing each other, on a face of a plate made of a piezoelectric material. An arranging step arranges the plate, fitted with the electrodes, in a tuning position in proximity to an ion source. Then, an exposing step exposes the plate to an ion flux produced by the source and the ions etch the metal. A measuring step measures the resonant frequency of the resonating function while the plate is in a tuning position. Finally, a raising step raises at least one electrode exposed to the ions to an adjustable bias voltage to control the rate at which the metal on the electrode is etched.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.