Patent · US Expired

Method for coating a substrate of low resistance to corrosion

US5407548A · kind A · utility

7Cited by

12References

11Claims

0Family size

Assignees

Leybold GmBH · DE
Degussa AG · DE

Inventors

Uwe Kopacz · Großkrotzenburg, DE
Christoph Daube · Alzenau, DE
Andreas Rack · Hanau, DE
Horst Dieter Becker · Bingen, DE
Uwe Konietzka · Rodenbach, DE
Martin Weigert · Lindlar, DE

Key dates

Filing date	Apr 29, 1993
Grant date	Apr 18, 1995
Priority date	—
Expiry date	Apr 29, 2013

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3321
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention concerns a process for coating a substrate 1 of little or no corrosion resistance, especially a metal substrate having an alloy consisting at least of Ni, Cr and Fe, in an evacuable coating chamber 15, 15a. It comprises making an electrode that can be connected to a current supply 10, this electrode being electrically connected to a target 3 which is sputtered and the sputtered particles of which are deposited on the substrate 1. Reactive process gases are, for this purpose, supplied to the coating chamber 15, 15a, so that an amorphously depositing layer 2 is applied onto the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.