Atomic force microscope with light beam emission at predetermined angle
US5408094A · kind A · utility
58Cited by
8References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 4, 1993 |
| Grant date | Apr 18, 1995 |
| Priority date | — |
| Expiry date | May 4, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/87
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever has a probe on one surface of the free end and a reflection surface on the opposite surface thereof. A laser diode is located so as to emit a laser beam to the reflection surface at a predetermined angle. The cantilever is supported at a support member fixed to a cylindrical actuator for scanning the probe across the surface of a sample. Further, there is provided a photodiode having two portions for receiving the laser beam from the reflection surface of the cantilever to detect displacement of the probe on the basis of the incident position of the beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.