Patent · US Expired

Waterborne photoresists having binders with sulfonic acid functionality

US5411837A · kind A · utility

3Cited by
6References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 12, 1994
Grant dateMay 2, 1995
Priority date
Expiry dateMay 12, 2014

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/111
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A waterborne photoimageable composition or photoresist comprises a latex binder polymer having acid acid functionality to render it developable in alkaline aqueous solution, at least about 50 mole percent of the acid functionality being sulfonic acid moieties, a photopolymerizeable monomer fraction, and a photoinitiator chemical system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.