Josephson junction
US5411937A · kind A · utility
13Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 1993 |
| Grant date | May 2, 1995 |
| Priority date | — |
| Expiry date | May 17, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/728
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.