Differential pressure sensor capable of removing influence of static pressure and a method of assembling the same
US5412992A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1992 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Dec 4, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A differential pressure sensor is disclosed, and in particular, there is disclosed a multiple function type differential pressure sensor capable of reducing a zero-point-change and a span change of means for detecting a differential pressure when applying a static pressure and being readily manufactured at high accuracy. The multiple function type differential pressure sensor is constructed by a semiconductor chip 1 for detecting a differential pressure, a fixing base 2 which has a joining part 21 joined to a thick part of the semiconductor chip 1 and which has a thickness less than or equal to that of the semiconductor chip 1, and also which has at least one thin part 22 in an outer periphery other than the joining part 21, and a housing 4 joined to the fixing base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.