Environmental control apparatus
US5413527A · kind A · utility
11Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1993 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Aug 31, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holder containing semiconductor substrates is held in an air-tight container for conveyance which is placed over the entrance of a chamber. The gas drawn by a first fan for circulating gas through the bottom wall of the chamber flows through a first duct for circulating gas so as to be cleaned by a first high-efficiency filter and to be supplied into the chamber again in a horizontal laminar flow. The clean gas is supplied into the chamber in a vertical laminar flow from a second duct for circulating gas which has a second fan for circulating gas and a second high-efficiency filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.