Method for making mechanical and micro-electromechanical devices
US5413668A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 1993 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Oct 25, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods for making mechanical and micro-electromechanical devices (a) forming a mold having a base and metallic walls defining a molding space therebetween, the base being exposed between the metallic walls and either being capable of or having a nucleating upper surface capable of nucleating the deposition of a structural material which does not nucleate on or adhere to the metallic walls at conditions of deposition; (b) depositing a structural material onto either the nucleating upper surface or base and filling to a predetermined height to form a strong solid body; and (c) removing the metallic walls, leaving free-standing, solid body walls of structural material attached to the base; another embodiment of the method may include step (a) and steps (b) filling the molding space with a diamond-nucleating material; (c) consolidating the diamond-nucleating material so as to form a strong solid body; and (d) removing the metallic walls, and thereby freeing the solid body, by dissolving the metallic walls with an agent, normally a liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.