CVD of silicon-based ceramic materials on internal surface of a reactor
US5413813A · kind A · utility
562Cited by
2References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 1993 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Nov 23, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/36
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a thin layer of a ceramic material, the layer being deposited by thermal decomposition of a non-oxygen containing silicon-nitrogen precursor in the vapor phase, in an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.