Method of modifying transparent conductive oxide film including method of manufacturing photovoltaic device
US5413959A · kind A · utility
21Cited by
7References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 10, 1993 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Sep 10, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/52
Abstract
In a method of modifying a transparent conductive oxide film and in a method of manufacturing a photovoltaic device, a transparent conductive oxide film is irradiated with an energy beam for increasing the carrier concentration and thereby reducing the resistance of the transparent conductive oxide film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.