Scanning probe microscope and method of observing samples by using the same
US5414260A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1993 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Apr 30, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope is used to observe a sample. The same portion of a surface of the sample is scanned forward and backward using a probe. A first signal corresponding to a structure of the sample is detected from the probe during a period in which the probe scans the surface of the sample forward. A second signal corresponding to the structure of the sample is detected from the probe during a period in which the probe scans the surface of the sample backward. When a difference is caused in at least a portion between the first and second signals, the portion of one of the first and the second signals is replaced by a portion of the other signal to generate a corrected signal. An image of the sample is formed using the corrected signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.