Enhanced imaging mode for transmission electron microscopy
US5414261A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1993 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | Jul 1, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In the magnetic optical system of a transmission electron microscope (TEM), the increased strength of a second objective lens is used to increase the longitudinal energy dispersion by forming an image at a magnified second back-focal plane. The electric current distribution of other lenses in the microscope is reconfigured to compensate for any offsets introduced by the modified second objective lens. A plurality of deflectors are installed which enable the manipulation of the electron beam electronically between the specimen and the second back-focal plane. The magnified second back-focal plane is projected onto the selected-area aperture, allowing the use of the existing selected-area aperture as an objective aperture to achieve an energy filtering effect which improves the image contrast and resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.