Magnetic storage system using thin film magnetic recording heads using phase-shifting mask
US5414580A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 1994 |
| Grant date | May 9, 1995 |
| Priority date | — |
| Expiry date | May 13, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F41/046
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for fabricating a thin-film magnetic read/write head that eliminates contrast effects producing notching in a thin-film magnetic head coil caused by subsurface reflectivity at a reflective layer step during a photolithography step in the fabrication of the coil is provided. The method comprises the steps of forming a first permalloy yoke on a substrate, wherein the edges of the first yoke create steps from the top of the first yoke down to the substrate, forming a partial conformal layer of an electric insulation material over the first permalloy yoke and the substrate, forming a conformal copper seed layer over the electric insulation layer, forming a conductive coil on the electric insulation layer, wherein the copper coil is fabricated using a lithography process including placing a phase-shifting mask, formed in the image of the coil and containing non-printable openings covered by transparent material of a thickness that creates a 180.degree. phase-shift in illumination, over a photoresist layer, the phase-shifting mask creating illumination destructive interference in regions of the photoresist that are covered by the mask layer and immediately adjacent to regions of…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.