Apparatus for coating a substrate with electrically nonconductive coatings

US5415757A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Joachim Szcyrbowski · Goldbach, DE
• Goetz Teschner · Gelnhausen, DE
• Guenter Braeuer · Alzenau, DE

Key dates

• Filing date: Dec 1, 1993
• Grant date: May 16, 1995
• Expiry date: Dec 1, 2013

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/0206
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Method and an apparatus for coating a substrate from electrically conductive targets (3, 4) in a reactive atmosphere, comprising a power source (12, 13, 14) which is connected to cathodes (1, 2) disposed in an evacuable coating chamber (15) and cooperating electrically with the targets (3, 4), two anodes (5, 6) electrically separated from one another and from the sputtering chamber (15) being provided, which lie in a plane between the cathodes (1, 2) and the substrate (7), the two output terminals (12a, 12b) of the secondary winding of a transformer (12) connected, with interposition of a choke coil (14), to a medium frequency generator (13) being connected each to a cathode (1 and 2, respectively) via two supply lines (20, 21) and the two supply lines (20, 21) being connected via a branch line (22) into which a resonant circuit is inserted, and each of the two supply lines (20, 21) being coupled both via a first network (16 and 17, respectively) to the coating chamber and via a corresponding second network (8 and 9, respectively) to the particular anode (5 and 6, respectively).