Patent · US Expired

Ultrafast scanning probe microscopy

US5416327A · kind A · utility

14Cited by
6References
34Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 29, 1993
Grant dateMay 16, 1995
Priority date
Expiry dateOct 29, 2013

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/85
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An ultrafast scanning probe microscopy method for achieving subpicosecond-temporal resolution and submicron-spatial resolution of an observation sample. In one embodiment of the present claimed invention, a single short optical pulse is generated and is split into first and second pulses. One of the pulses is delayed using variable time delay means. The first pulse is then directed at an observation sample located proximate to the probe of a scanning probe microscope. The scanning probe microscope produces probe-sample signals indicative of the response of the probe to characteristics of the sample. The second pulse is used to modulate the probe of the scanning probe microscope. The time delay between the first and second pulses is then varied. The probe-sample response signal is recorded at each of the various time delays created between the first and second pulses. The probe-sample response signal is then plotted as a function of time delay to produce a cross-correlation of the probe sample response. In so doing, the present invention provides simultaneous subpicosecond-temporal resolution and submicron-spatial resolution of the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.