Monolithic chip containing integrated circuitry and suspended microstructure
US5417111A · kind A · utility
81Cited by
87References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 10, 1993 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Jun 10, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention is a monolithic sensor comprising a silicon substrate, a suspended polysilicon microstructure for sensing a condition disposed above and suspended from the substrate, and circuitry for resolving a signal based on said sensed condition, the circuitry including bipolar circuit elements and MOS circuit elements. One disclosed embodiment is particularly adapted for sensing acceleration by means of a differential capacitor arrangement in which one capacitor plate in the arrangement is moveable responsive to an acceleration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.