Integrated microvalve structures with monolithic microflow controller
US5417235A · kind A · utility
262Cited by
6References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 1993 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Jul 28, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0318
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Micromachined microvalves are held both open and closed electrostatically to maintain uniform gas microflow and improve closure characteristics. A microflow controller containing such a valve is combined with a predetermined restricted flow path. Multiple valve/restrictive flow path combinations are integrated on a binary flow path basis. Single and/or multiple valve actuation provides precise but variable flow control. Temperature and pressure sensors can be integrally included. Various valve and controller configurations, and methods of controlling them and forming them, are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.